The plasma cleaner can be used to simultaneously clean the specimen and specimen stage, which in many cases, eliminates contamination of the specimen being analyzed. The specimen holder and specimen are subjected to reactive gas (a mixture of 75% argon and 25% oxygen) plasma prior to electron microscope images and analysis. The model 1020 plasma cleaner is compatible with TEM specimen holders for Hitachi, JEOL, et al.


  • Plasma system : High frequency (13.56 MHz) oscillating field system coupled to a quartz and stainless steel plasma chamber
  • Ion energy: less than 12eV