introduction

It is employed in a wide spectrum of SEM, FIB and other microscopes for an even wider range of applications and it has become the industry standard for OEM and retrofit solutions with over 1000 units in the field.

specifications

  • No backlash or reversal play
  • Sub-nanometer resolution (0.25 nm) 
  • Extensive working range (100 cm³)
  • No "blind axis" like with cartesian systems
  • Integrated coarse and fine displacement in one drive
  • High operating velocity (up to 10 mm/sec)