Hitachi HF5000 TEM/STEM, with spherical aberration corrector, has been developed to achieve sub-angstrom(Å) imaging combined with high-sensitivity elemental analysis. 0.078 nm spatial resolution in STEM is achieved together with high specimen-tilt capability and large solid angle EDX detector(s), all in a single objective lens configuration.

The HF5000 builds on features from Hitachi HD-2700 dedicated STEM including Hitachi’s own fully automated aberration corrector, symmetrical dual SDD EDX and Cs-corrected SE imaging. It also incorporates the advanced TEM/STEM technologies developed in the HF series. Integrating these accumulated technologies into a new 200 kV TEM/STEM platform results in an instrument with an optimum combination of sub- Å imaging and analysis, as well as the flexibility and unique capabilities to address the most advanced studies.

HF5000 features

1. Hitachi fully automated probe-forming spherical aberration corrector

2. High-brightness and high-stability cold FE electron gun (Cold FEG)

3. Ultra-stable column and power supplies for enhanced instrument performance

4. Simultaneous Cs-corrected SEM & STEM imaging capability with atomic resolution

5. New high-stability side-entry specimen stage and specimen holder

6. Symmetrically opposed dual 100 mm² EDX detectors: “Symmetrical Dual SDD”

7. Newly designed enclosure for optimum performance in real laboratory enviroments

8. A wide range of Hitachi advanced specimen holders

Specification